Custom Ion-sources / Ion-optics
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Custom retractable TE-detector with Faraday cup
Vacuum Transfer Systems
Eu-centric Manipulators
Airlocks
Integrated Beam Unit (IBU) is our signature ion beam in-situ milling-imaging system. It has been designed in response to ever challenging metrology and failure analysis needs at the nano-scale. It is optimized for such applications as site-specific planar polishing, etching, in-situ continuous milling and imaging, 2D-to-3D image reconstruction and materials analysis.